High-power Impulse Magnetron Sputtering, HiPIMS

 

Invited speaker

 

 

 

Prof. Xingguang Liu

Anhui University of Technology

E-mail: xingguangliu@ahut.edu.cn

Title: Plasma diagnosis and structure regulation of binary Ti-Al, Al-Cr, Al-Si and TiNbZrMoV high-entropy-alloy films prepared by HiPIMS

 

Profile:

Xingguang Liu, PhD, Professor, Senior Engineer.

He obtained his PhD degree from the University of Sheffield, UK (funded by the China Scholarship Council)

He is committed to the design, preparation, analysis, characterization, performance evaluation, and industrial application of anti-wear/solid lubricating films, especially carbon-based solid lubricating films prepared via physical vapor deposition (PVD). The carbon-based superlubricating films was applied to China's flexible spacecraft (BP-1B) and verified through in-orbit flight. He has leaded or engaged as a key member more than 10 projects, with one R&D Project reported by CCTV News. He has published more than 20 peer-reviewed academic papers, authorized 9 patents, and won 1 First Prize of Anhui Provincial Science and Technology Progress Award and 2 First Prizes of Science and Technology Progress Award of China Surface Engineering Association.

 

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